Call for Abstracts Deadline: February 5, 2026
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  • Overview
    • Awards
      • ALD Innovator Awardee
      • ALD Outstanding Presentation Award
      • ALD Young Investigator Award
      • ALD Students Awards
      • ALE Student Awards
      • JVST A Best ALD and ALE Paper Award
    • Code of Conduct (PDF)
    • Committee
    • Manuscripts
    • Photo Gallery
  • Abstract Submission
    • Copyright Agreement (PDF)
  • Housing & Travel
    • About Tampa
    • Conference Hotel
    • Transportation
    • Travel Requirements
  • Program
    • Invited Speakers
      • Plenary Speaker
      • ALD & ALD Joint Invited Speakers
      • ALD Invited Speakers
      • ALE Invited Speakers
      • Tutorial Speakers
    • Presentation Guidelines
  • Sponsors & Exhibitors
    • Exhibitors
    • Sponsors
    • Sponsor & Exhibit Prospectus (PDF)
    • Sponsor and Exhibit Form (Online)

Awards

ALD Innovator Awardee

The ALD Innovator award “For Original Work and Leadership in ALD” will be presented during one of the Plenary Lecture Sessions in Tampa, Florida.

ALD Outstanding Presentation Award

The ALD Outstanding Presentation Award sponsored by Synos Foundation will be presented annually to the best paper/presentation submitted to an ALD session at the Conference by a non-student, non-early career presenter.

Five finalists will be selected from the top ranked abstract submissions by non-student, non-early-career presenters. Final nominees will be announced at the ALD Conference, and awardees will be selected by a review committee based on the presentation given during the Conference. Awardees will be announced at the Conference closing ceremony on Wednesday.

The award consists of a $1,500 cash prize, up to $500 in travel reimbursement, and a certificate.

ALD Young Investigator Award

The ALD Young Investigator Award sponsored by GO Element will be presented to up to three people who give oral presentations at the ALD Conference who have received their Ph.D. degree within the past ten years. If you received your PhD in 2016 or after, and if you are interested in being considered for this award, please reply to events@avs.org  by TBD. Please note that recipients of other 2025 ALD awards are not eligible to receive this award.

In your response, please provide the following:

  • Name:
  • PhD Institution:
  • Graduation date:
  • Abstract Number (e.g., AA-TuM-17):
  • Session:
  • Presentation Date/Time:

Final nominees will be announced at the ALD Conference, and awardees will be selected by a review committee based on the presentation given during the Conference. Awardees will be announced at the Conference closing ceremony on Wednesday.

The award consists of a $1,000 cash prize and a certificate.

ALD Student Awards

ALD student awards have been established to recognize outstanding research performed by a graduate student in areas of interest to Atomic Layer Deposition. All Student Awards will be presented on Wednesday during the closing remarks.

ALD Student Oral Finalists will be chosen from the submitted student abstracts. ALD Student Finalists will receive a $500 award upon completing the competition. Competition for the award requires attendance at ALD 2025 and a student presentation of the work in an oral session.

The ALD Dr. Tuomo Suntola Best Student Oral Presentation Award winner will be selected on the basis of the oral presentation, considering quality of research and clarity of presentation. The award consists of a $1,000 cash prize and a certificate.

In addition, several ALD Student Poster Awards will be presented on Wednesday during the closing remarks. All accepted student poster abstracts are eligible.

ALE Student Awards

ALE student awards have been established to recognize outstanding research performed by a graduate student in areas of interest to Atomic Layer Etching.

ALE Student Oral Finalists will be chosen from the submitted student abstracts. Competition for the award requires attendance at ALE 2025. The first place ALE Best Student Oral Presentation Award consists of $1,000.00 USD and a certificate. The second place ALE Best Student Oral Presentation Award consists of $500.00 USD and a certificate. The awards will be presented to the winners on the last day of the conference during the closing remarks.

In addition, several ALE Student Poster Awards will be presented on Wednesday during the closing remarks. All accepted student poster abstracts are eligible.

JVST A Best ALD and ALE Paper Award

Journal of Vacuum Science & Technology A (JVST A) has been publishing articles originating from the ALD Conference and ALE Workshop since 2010 as Special Collections and will continue to do so each year. A JVST A Best ALD Paper Award and Best ALE Paper Award have been established to recognize outstanding articles contributed to the JVST A ALD and ALE Special Collections. Each year JVST A Editors will select the winning paper from the articles published in the most recent ALD and ALE Special Collections. Eligible papers will include at least one author who participated in the ALD Conference or ALE Workshop. Authors on the winning papers will share a $1,000 cash award per paper and each of them will be presented with a certificate acknowledging their exceptional accomplishment. The winning papers will be made freely available for a period of two years and widely promoted via email and on social and professional networks. JVST A does not have page or publication charges and is the flagship journal of AVS, a nonprofit professional society.

ALD Innovator Awardees

  • 2011: Roy Gordon
  • 2012: Markku Leskela
  • 2013: Steve George
  • 2014: Hyeongtag Jeon
  • 2015: Gregory Parsons
  • 2016: Suvi Haukka
  • 2017: Jeff Elam
  • 2018: Hyungjun Kim
  • 2019: W.M.M. (Erwin) Kessels
  • 2020: Mikko Ritala
  • 2021: Stacey F. Bent
  • 2022: Cheol Seong Hwang
  • 2023: Simon Elliott
  • 2024: Annelies Delabie
  • 2025: Christophe Detavernier

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Key Dates

Abstract Submission Deadline:
February 5, 2026

Author Acceptance Notifications:
March 16, 2026

Early Registration Deadline:
May 1, 2026

Hotel Reservation Deadline:
May 1, 2026

Manuscript Deadline:
Novmeber 1, 2026

Downloads

  • Code of Conduct (PDF)
  • Copyright Agreement (PDF)
  • Presentation Guidelines
  • Sponsor & Exhibit Form (PDF)

Contact

AVS
Della Miller

Event Manager
110 Yellowstone Dr. Suite 120
Chico, CA 95973
(530) 896-0477
della@avs.org

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