Call for Abstracts Deadline: February 5, 2026
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#ALDALE2026
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  • Overview
    • Awards
      • ALD Innovator Awardee
      • ALD Outstanding Presentation Award
      • ALD Young Investigator Award
      • ALD Students Awards
      • ALE Student Awards
      • JVST A Best ALD and ALE Paper Award
    • Code of Conduct (PDF)
    • Committee
    • Manuscripts
    • Photo Gallery
  • Abstract Submission
    • Copyright Agreement (PDF)
  • Housing & Travel
    • About Tampa
    • Conference Hotel
    • Transportation
    • Travel Requirements
  • Program
    • Invited Speakers
      • Plenary Speaker
      • ALD & ALD Joint Invited Speakers
      • ALD Invited Speakers
      • ALE Invited Speakers
      • Tutorial Speakers
    • Presentation Guidelines
  • Sponsors & Exhibitors
    • Exhibitors
    • Sponsors
    • Sponsor & Exhibit Prospectus (PDF)
    • Sponsor and Exhibit Form (Online)

Overview

The AVS 26th International Conference on Atomic Layer Deposition (ALD 2026) featuring the 13th International Atomic Layer Etching Workshop (ALE 2026) will be a three-day meeting dedicated to the science and technology of atomic layer controlled deposition of thin films and atomic layer etching.  Since 2001, the ALD conference has been held alternately in the United States, Europe and Asia, allowing fruitful exchange of ideas, know-how and practices between scientists. The conference will take place Sunday, June 28-Wednesday, July 1, 2026, at the JW Marriott Water Street, Tampa, Florida.

As in past conferences, the meeting will be preceded (Sunday, June 28) by one day of tutorials and perspectives and a welcome reception. Sessions will take place (Monday-Wednesday, June 29-July 1) along with an industry tradeshow. All presentations will be audio-recorded and provided to attendees following the conference (posters will be included as PDFs). Anticipated attendance is 700+. View List of Invited Speakers

Abstract Submission

Abstract Submission Deadline:
February 5, 2026

SUBMIT ABSTRACT

ALD Program Chairs

ALE Program Chairs

Program Chair:
Virginia “Ginger” Wheeler
(Naval Research Laboratory, USA)

Program Co-Chair:
Parag Banerjee
(University of Central Florida, USA)

Program Chair:
Christophe Vallée
(University at Albany – SUNY, USA)

Program Co-Chair:
Nathan Marchack
(IBM, USA)

Key Dates

Abstract Submission Deadline:
February 5, 2026
Author Acceptance Notifications:
March 16, 2026
Early Registration Deadline:
May 1, 2026
Hotel Reservation Deadline:
May 1, 2026
Manuscript Deadline:
November 1, 2026

Future Dates

ALD/ALE 2027:
TBD
ALD/ALE 2028:
TBD

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Key Dates

Abstract Submission Deadline:
February 5, 2026

Author Acceptance Notifications:
March 16, 2026

Early Registration Deadline:
May 1, 2026

Hotel Reservation Deadline:
May 1, 2026

Manuscript Deadline:
Novmeber 1, 2026

Downloads

  • Code of Conduct (PDF)
  • Copyright Agreement (PDF)
  • Presentation Guidelines
  • Sponsor & Exhibit Form (PDF)

Contact

AVS
Della Miller

Event Manager
110 Yellowstone Dr. Suite 120
Chico, CA 95973
(530) 896-0477
della@avs.org

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